Mass flow controllers for semiconductor and vacuum applications

Alicat Scientific has published a brochure on mass flow controller applications in the semiconductor market and in vacuum applications. For example, the MCE series mass flow meter is designed specifically for the semiconductor industry, is equipped with VCR fittings and is a good alternative to the MKS 1179A. There is also the MCE mass flow controller with a pneumatic shut-off valve for vacuum applications, a good alternative to the MKS 2179A. Download the brochure by clicking SEMI - VACUUM.